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This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.
Zakup książki
Computational Modeling in Semiconductor Processing, M. Meyyappan
- Język
- Rok wydania
- 1995
- Oprawa
- (twarda)
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- Tytuł
- Computational Modeling in Semiconductor Processing
- Język
- angielski
- Autorzy
- M. Meyyappan
- Wydawca
- Artech House Publishers
- Rok wydania
- 1995
- Oprawa
- twarda
- Liczba stron
- 384
- Seria
- Tagi
- Opis
- This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.