Principles of Materials Characterization and Metrology

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Characterization provides a detailed understanding of material properties (Science) to forecast their behavior (Engineering). This text offers an in-depth exploration of materials characterization and metrology principles. It begins with fundamental concepts of bonding, electronic structures, and atomic arrangements in crystals. Various characterization techniques utilizing electrons, photons, ions, neutrons, and scanning probes are discussed, including their generation and beam-solid interactions that influence their application. The coverage extends to ion-scattering methods, optics, optical diffraction, microscopy, and ellipsometry. The generalization of Fraunhofer diffraction to three-dimensional atomic arrangements leads to X-ray, electron, and neutron diffraction methods applicable to surfaces and bulk materials. The text also addresses transmission and analytical electron microscopy, alongside recent advancements, and includes chapters on scanning electron microscopy and scanning probe microscopies. Concluding with detailed tables, it summarizes key points and interrelations among different spectroscopy, diffraction, and imaging techniques. This work integrates physical principles with practical applications, illustrating the fundamental properties of diverse materials through a tool-based approach. Drawing on forty years of teaching and research, it features worked examples and extensive questions to enhance the reader